ZYGO ZMI-2002 8020-0211 High precision dual axis measuring board

ZYGO ZMI-2002 8020-0211 High precision dual axis measuring board

Specific Parameters

• Electrical ParametersMeasurement Axes: Dual axes, supporting synchronous measurement of two orthogonal axesMeasurement Accuracy: Less than 1 nanometerTime Resolution: 25 nanosecondsTime Range: 107.4 secondsPower Supply Voltage: +5V ±5%, operating current 3.5AInterface Types: VME, ISA bus interfaces, simplified P2 signal interfaceData Transmission: Supports D16 or D32 data width, A16 or A24 addressing modeData Rate: P2 interface data rate up to 7.7MHzInterrupt Function: Supports D08 interrupt acknowledgment cycleSignal Processing: Integrated digital signal processing module, compatible with analog and digital input signals
• Environmental ParametersOperating Temperature: 0℃ to 40℃ (non-condensing environment)Storage Temperature: -20℃ to 60℃Relative Humidity: 5% to 90% (non-condensing)Protection Rating: IP54Anti-interference Performance: Complies with VMEBus Specification Revision C.1, with low-noise signal processing capability
• Mechanical ParametersOverall Dimensions: 229mm×114mm×29mmHousing Material: Metal shielded case with anti-corrosion treatmentWeight: 1.2 kilogramsMounting Method: Standard slot installation in 6U VME chassisCompliance Standard: Conforms to VME bus mechanical specifications

Product Performance

Outstanding dual-axis synchronous measurement capability: It can capture displacement changes of two orthogonal axes simultaneously, and combined with 25-nanosecond time resolution, it can real-time restore fast dynamic displacement processes, adapting to the needs of 3D profile and surface shape measurement.

Nanometer-level measurement accuracy: The accuracy index of less than 1 nanometer, combined with low-noise signal processing technology, can accurately identify micro-displacement, meeting the detection requirements of high-precision workpieces such as semiconductor wafers and optical components.

Strong system expandability: Multi-board cascading is achievable via P2 interface bus, supporting expansion up to 16 measurement axes while maintaining a high data transmission rate of 7.7MHz. A multi-axis measurement system can be built without additional adapter modules.

Excellent integration and compatibility: Compliant with VMEBus specification, it supports VME/ISA dual-bus programming control, and can be directly connected to servo cards, motor controllers and host computer systems. The parameter configuration and data reading processes are simplified, adapting to complex system environments of industrial automation and scientific experiments.

Reliable operational stability: The metal shielded case resists electromagnetic interference, and IP54 protection rating isolates dust and splashes. It can operate continuously and stably in the 0-40℃ industrial temperature range, meeting the needs of long-term high-precision measurement scenarios.