TEL TVB6002-1/IMC 1308-644857-12 1381-644857-16 Process control module

Specific Parameters

Brand TEL (Tokyo Electron, Japanese Brand)

Product Series TEL TVB Series Semiconductor Process Control Module

Product Type Dedicated Vacuum and Process Control Module for Semiconductor Equipment

Model TVB6002-1/IMC 1308-644857-12 1381-644857-16

Supply Voltage 220VAC, compatible with industrial wide voltage adaptation range

Operating Temperature Range 0℃ to +60℃

Storage Temperature Range -40℃ to +85℃

Relative Humidity 5% to 95%, No Condensation

Protection Level IP65

Communication Interfaces Supports RS-232, Ethernet interfaces

Physical Dimensions Approximately 230mm×130mm×65mm

Physical Weight ≤2kg

Core Functions Vacuum control, temperature control, pressure control, gas flow control, leak detection

Wetted Material 1.4404/1.4435 (316L stainless steel)

Auxiliary Functions Data recording, fault diagnosis, remote monitoring

Product Performance

Adopting advanced microcontroller technology, it integrates multiple process control functions, which can simultaneously realize precise regulation of vacuum, temperature, pressure and gas flow. A single module replaces multiple components, simplifying the system architecture.

IP65 high protection level combined with 316L stainless steel wetted material has excellent corrosion resistance and dust resistance, enabling long-term stable operation under special working conditions of semiconductor manufacturing with strong trouble-free reliability.

Supports RS-232 and Ethernet dual-interface communication, enabling high-speed data interaction with the main control system as well as remote monitoring and fault diagnosis, greatly improving operation and maintenance efficiency and reducing on-site maintenance costs.

The leak detection function responds quickly, which can real-time capture vacuum system leak abnormalities and issue alarms, avoiding product defects caused by process deviations and ensuring semiconductor production yield.

The modular design is compatible with various TEL semiconductor manufacturing equipment, facilitating easy installation and debugging, and can be seamlessly integrated into existing control systems, supporting the upgrading and transformation of new and old equipment with strong versatility.

The control accuracy of parameters such as temperature and pressure meets the strict requirements of semiconductor processes, and the data recording function can retain key process parameters, providing data support for production traceability and process optimization.