PFEIFFER EVR116 Electric vacuum baffle valve
Specific Parameters
Electrical Parameters
Power Supply: 24V DC (±10% fluctuation tolerance), supports 110/230V AC (dedicated power module required)Rated Power: Startup power ≤15W, standby power ≤5WOperation Time: Valve opening time ≤0.8s, closing time ≤0.6sFeedback Signal: 2 sets of dry contact outputs (corresponding to “valve fully open” and “valve fully closed” status respectively)Protection Class: IP40 (electrical interface part), withstanding voltage ≥1500V AC (1 minute)
Mechanical Parameters
Flange Specification: DN16 (nominal diameter), compatible with ISO-K 16 or CF 16 vacuum flangesMaximum Vacuum Level: 10^-9 mbar (metal seal version), 10^-8 mbar (FKM seal version)Valve Body Material: 316L stainless steel (corrosion-resistant, electrolytically polished surface)Seal Material: Optional FKM (fluororubber, temperature resistance -20℃ to +200℃) or Cu (oxygen-free copper, temperature resistance -270℃ to +400℃)Manual Operation: Top-integrated knob-type manual operation mechanism, allowing state switching without toolsWeight: Approximately 1.2kg (ISO-K flange version), approximately 1.5kg (CF flange version)
Environmental Parameters
Operating Temperature: -20℃ to +80℃ (FKM seal), -270℃ to +400℃ (Cu seal)Storage Temperature: -30℃ to +90℃ (non-condensing)Relative Humidity: ≤90% RH (operating state, non-condensing)Vibration Resistance: 10-500Hz frequency range, 1g acceleration (sine wave), 30 minutes of continuous testing per axisCertifications: CE (EMC/Low Voltage Directive), RoHS 2.0 compliance, FDA (food contact-grade seal option)
Product Performance
Excellent vacuum tightness: The leak rate of the metal seal version is ≤10^-10 mbar·l/s, and that of the FKM seal version is ≤10^-9 mbar·l/s, which can maintain an ultra-high vacuum environment for a long time without gas leakage risk.
High operational reliability: Adopting a DC permanent magnet drive motor, it has fast startup response (≤0.8s) and a continuous operation life of ≥10^6 cycles. It can still operate stably when the voltage fluctuates by ±10%, adapting to long-term continuous production scenarios.
Strong environmental adaptability: The wide temperature operating range covers low temperature (-270℃, compatible with liquid nitrogen cooling systems) to high temperature (+400℃, compatible with high-temperature vacuum furnaces). The 316L stainless steel valve body can resist corrosion from acidic and alkaline process gases.
Good control compatibility: Supports remote control via dry contacts, PLC or vacuum system controller. The status feedback signal can be directly connected to HMI to realize real-time monitoring of the valve status, without additional adaptation modules.
Excellent maintenance convenience: The seal component adopts a snap-on design, and no valve body disassembly is required for replacement; the manual operation mechanism has no wearing parts, and daily maintenance only requires regular cleaning of the flange sealing surface, with a maintenance cycle of ≥12 months.















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