MKS AX-7670 0190-47768 AMAT HDP CVD – Advanced Plasma Technology for Semiconductor Manufacturing
The MKS AX-7670 0190-47768 AMAT HDP CVD is a specialized semiconductor manufacturing process module designed for high-density plasma chemical vapor deposition (HDP-CVD). It provides superior film quality and uniformity, essential for advanced semiconductor fabrication processes.
Manufacturer:MKS Instruments
Model Number:AX-7670
Submodel Number:0190-47768
Module Category:Plasma Enhancer
Voltage:200V-240V AC
Power Consumption:500W
Operating Temperature Range:-20°C to 60°C
Dimensions:22.86cm x 30.48cm x 15.24cm
Weight:7.2kg
Certifications:CE, RoHS
Designed for demanding semiconductor applications, the MKS AX-7670 delivers unparalleled precision in plasma etching.
With its innovative HDP-CVD technology, this module ensures consistent etching results across large wafers, enhancing the quality and reliability of semiconductor devices.
The robust design includes a user-friendly interface and a modular architecture, allowing for easy maintenance and upgrades.
Each unit undergoes rigorous testing to meet CE, UL, and RoHS standards, ensuring safety and compliance.
Choose the MKS AX-7670 for superior performance in your advanced fabrication processes.



















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